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Definition of Alignment mark

Alignment mark Definition from Computer & Internet Dictionaries & Glossaries
Integrated Circuit Terminology
mark or target on a reticle or mask that is used to achieve alignment. For example, a wafer might have a cross printed on it from a previous layer, and a  reticle might have a cross designed to fit inside the cross already on the  wafer. When the smaller cross fits within the larger cross, the  reticle is aligned to the wafer.
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